Coverart for item
The Resource Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States, Alexander Starikov, editor ; sponsored by SPIE ; cosponsored by Nova Measuring Instruments Ltd

Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States, Alexander Starikov, editor ; sponsored by SPIE ; cosponsored by Nova Measuring Instruments Ltd

Label
Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States
Title
Metrology, inspection, and process control for microlithography XXVI
Title remainder
13-16 February 2012, San Jose, California, United States
Statement of responsibility
Alexander Starikov, editor ; sponsored by SPIE ; cosponsored by Nova Measuring Instruments Ltd
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
no index present
LC call number
TK7874
LC item number
.I5554 2012e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1952-
http://library.link/vocab/relatedWorkOrContributorName
  • Starikov, Alexander
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
v. 8324
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Microlithography
  • Process control
Label
Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States, Alexander Starikov, editor ; sponsored by SPIE ; cosponsored by Nova Measuring Instruments Ltd
Instantiates
Publication
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819489807
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote
Label
Metrology, inspection, and process control for microlithography XXVI : 13-16 February 2012, San Jose, California, United States, Alexander Starikov, editor ; sponsored by SPIE ; cosponsored by Nova Measuring Instruments Ltd
Publication
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
Form of item
online
Isbn
9780819489807
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations (some color).
Specific material designation
remote

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