The Resource Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)

Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)

Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia
Title
Micro- and nano-electronics 2003
Title remainder
6-10 October 2003, Zvenigorod, Russia
Statement of responsibility
Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2003
http://bibfra.me/vocab/lite/meetingName
ICMNE-2003
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Valiev, Kamilʹ Akhmetovich
  • Orlikovskiĭ, A. A.
  • Society of Photo-optical Instrumentation Engineers
  • Society of Photo-optical Instrumentation Engineers
  • Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk)
  • Russia (Federation)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
5401
http://library.link/vocab/subjectName
  • Microelectronics
  • Nanotechnology
  • Lithography
  • Photonics
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)
Instantiates
Publication
Note
"Selected papers ... ICMNE-2003"--P. xvii
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
xvii, 762 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)
Publication
Note
"Selected papers ... ICMNE-2003"--P. xvii
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
xvii, 762 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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