The Resource Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)

Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)

Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia
Title
Micro- and nano-electronics 2003
Title remainder
6-10 October 2003, Zvenigorod, Russia
Statement of responsibility
Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.I26 2003
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2003
http://bibfra.me/vocab/lite/meetingName
ICMNE-2003
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Valiev, Kamilʹ Akhmetovich
  • Orlikovskiĭ, A. A.
  • Society of Photo-optical Instrumentation Engineers
  • Society of Photo-optical Instrumentation Engineers
  • Fiziko-tekhnologicheskiĭ institut (Rossiĭskai︠a︡ akademii︠a︡ nauk)
  • Russia (Federation)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
5401
http://library.link/vocab/subjectName
  • Microelectronics
  • Nanotechnology
  • Lithography
  • Photonics
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)
Instantiates
Publication
Note
"Selected papers ... ICMNE-2003"--P. xvii
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xvii, 762 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia, Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.], (electronic book)
Publication
Note
"Selected papers ... ICMNE-2003"--P. xvii
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xvii, 762 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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