The Resource Microelectronic device technology : 1-2 October 1997, Austin, Texas, Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society, (electronic book)

Microelectronic device technology : 1-2 October 1997, Austin, Texas, Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society, (electronic book)

Label
Microelectronic device technology : 1-2 October 1997, Austin, Texas
Title
Microelectronic device technology
Title remainder
1-2 October 1997, Austin, Texas
Statement of responsibility
Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.381
Illustrations
illustrations
Index
index present
LC call number
TK7871.85
LC item number
.M5157 1997
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Rodder, Mark
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
3212
http://library.link/vocab/subjectName
  • Semiconductors
  • Semiconductors
  • Microelectronics
Label
Microelectronic device technology : 1-2 October 1997, Austin, Texas, Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 398 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Microelectronic device technology : 1-2 October 1997, Austin, Texas, Mark Rodder ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 398 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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