The Resource Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology, (electronic book)

Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology, (electronic book)

Label
Micromachined devices and components III : 29 September 1997, Austin, Texas
Title
Micromachined devices and components III
Title remainder
29 September 1997, Austin, Texas
Statement of responsibility
Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology
Title variation
  • Micromachined devices and components 3
  • Micromachined devices and components three
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TJ163
LC item number
.M4932 1997
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Chau, Kevin
  • French, Patrick J
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International.
  • National Institute of Standards and Technology (U.S.)
  • SPIE Digital Library
Series statement
SPIE proceedings series,
Series volume
3224
http://library.link/vocab/subjectName
  • Electromechanical devices
  • Micromechanics
  • Micromachining
Label
Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 382 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Micromachined devices and components III : 29 September 1997, Austin, Texas, Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 382 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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