The Resource Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology, (electronic book)

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology, (electronic book)

Label
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title
Micromachining and microfabrication process technology III
Title remainder
29-30 September, 1997, Austin, Texas
Statement of responsibility
Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TJ1191.5
LC item number
.M552 1997
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Pang, Stella W
  • Chang, Shih-Chia
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International.
  • National Institute of Standards and Technology (U.S.)
Series statement
SPIE proceedings series,
Series volume
3223
http://library.link/vocab/subjectName
  • Micromachining
  • Microfabrication
  • Electromechanical devices
Label
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 310 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas, Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 310 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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