The Resource Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA), (electronic book)

Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA), (electronic book)

Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA
Title
Micromachining technology for micro-optics and nano-optics III
Title remainder
25-27 January 2005, San Jose, California, USA
Statement of responsibility
Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
Related
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TA1660
LC item number
.M5372 2005
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1969-
http://library.link/vocab/relatedWorkOrContributorName
  • Johnson, Eric G.
  • Nordin, Gregory P
  • Suleski, Thomas J.
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
  • Solid State Technology (Organization)
  • Sandia National Laboratories
Series statement
Proceedings of SPIE,
Series volume
5720
http://library.link/vocab/subjectName
  • Integrated optics
  • Miniature electronic equipment
  • Optoelectronic devices
  • Micromachining
  • Microelectromechanical systems
  • Nanotechnology
Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA), (electronic book)
Instantiates
Publication
Note
First conference has title: Micromachining technology for micro-optics
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xl, 282 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA, Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA), (electronic book)
Publication
Note
First conference has title: Micromachining technology for micro-optics
Bibliography note
Includes bibliographical references and author index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
xl, 282 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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