The Resource Optical laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, (electronic book)

Optical laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, (electronic book)

Label
Optical laser microlithography III : 7-9 March 1990, San Jose, California
Title
Optical laser microlithography III
Title remainder
7-9 March 1990, San Jose, California
Statement of responsibility
Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Title variation
  • Optical/laser microlithography three
  • Optical/laser microlithography 3
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.36/6
Illustrations
illustrations
Index
index present
LC call number
TA1677
LC item number
.O68 1990
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Pol, Victor.
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
Proceedings / SPIE--the International Society for Optical Engineering,
Series volume
1264
http://library.link/vocab/subjectName
  • Lasers
  • Optical instruments
  • Microlithography
Label
Optical laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 586 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Optical laser microlithography III : 7-9 March 1990, San Jose, California, Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 586 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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