Coverart for item
The Resource Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands, Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique [and others]

Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands, Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique [and others]

Label
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands
Title
Optical microlithographic technology for integrated circuit fabrication and inspection
Title remainder
2-3 April 1987, the Hague, the Netherlands
Statement of responsibility
Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique [and others]
Contributor
Subject
Genre
Language
eng
Member of
Action
digitized
Cataloging source
OCLCE
Dewey number
621.381/73
Illustrations
illustrations
Index
index present
LC call number
TK7874
LC item number
.O66 1987
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Stover, Harry L.
  • Wittekoek, Steven.
  • Association nationale de la recherche technique.
Series statement
Proceedings / SPIE
Series volume
v. 811
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
Label
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands, Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique [and others]
Instantiates
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (x, 211 pages)
Form of item
online
Isbn
9780892528462
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Label
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands, Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique [and others]
Publication
Antecedent source
file reproduced from original
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource (x, 211 pages)
Form of item
online
Isbn
9780892528462
Level of compression
  • lossless
  • lossy
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
illustrations.
Reformatting quality
  • preservation
  • access
Reproduction note
Electronic reproduction.
Specific material designation
remote
System details
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.

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