The Resource Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)

Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)

Label
Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California
Title
Optical/laser microlithography VIII
Title remainder
22-24 February 1995, Santa Clara, California
Statement of responsibility
Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Title variation
  • Optical laser microlithography VIII
  • Optical/laser microlithography 8
  • Optical/laser microlithography eight
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Brunner, Timothy A
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International.
  • SPIE Digital Library
Series statement
Proceedings / SPIE--the International Society for Optical Engineering,
Series volume
2440
http://library.link/vocab/subjectName
  • Microlithography
  • Masks (Electronics)
  • Photoresists
  • Microlithography
  • Lenses
Label
Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
xii, 948 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California, Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Dimensions
28 cm.
Dimensions
unknown
Extent
xii, 948 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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