The Resource Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas, Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)

Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas, Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)

Label
Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas
Title
Process, equipment, and materials control in integrated circuit manufacturing
Title remainder
25-26 October 1995, Austin, Texas
Statement of responsibility
Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Dewey number
621.3815
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.P73 1995
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Sabnis, Anant G
  • Raaijmakers, Ivo J
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International.
  • SPIE Digital Library
Series statement
Proceedings / SPIE--the International Society for Optical Engineering,
Series volume
2637
http://library.link/vocab/subjectName
  • Integrated circuits industry
  • Integrated circuits
  • Manufacturing processes
  • Plasma etching
  • Metallizing
Label
Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas, Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
vii, 238 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas, Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
vii, 238 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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