The Resource Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain, Carles Cane+ѓ, Jung-Chih Chiao, Fernando Vidal Verdu+ѓ, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectro+ѓnica (Spain) ... [et al.], (electronic book)

Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain, Carles Cane+ѓ, Jung-Chih Chiao, Fernando Vidal Verdu+ѓ, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectro+ѓnica (Spain) ... [et al.], (electronic book)

Label
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain
Title
Smart sensors, actuators, and MEMS II
Title remainder
9-11 May 2005, Seville, Spain
Statement of responsibility
Carles Cane+ѓ, Jung-Chih Chiao, Fernando Vidal Verdu+ѓ, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectro+ѓnica (Spain) ... [et al.]
Title variation
  • Smart sensors, actuators, and MEMS 2
  • Smart sensors, actuators, and MEMS two
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.S518 2005
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Cané, Carles.
  • Chiao, Jung-Chih.
  • Verdú, Fernando Vidal
  • SPIE Europe.
  • AnaFocus (Firm)
  • Centro Nacional de Microelectrónica (Spain)
  • Society of Photo-optical Instrumentation Engineers
  • SPIE Digital Library
Series statement
Proceedings of SPIE proceedings series
Series volume
5836
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Microtechnology
  • Actuators
  • Detectors
  • Scanning systems
Label
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain, Carles Cane+ѓ, Jung-Chih Chiao, Fernando Vidal Verdu+ѓ, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectro+ѓnica (Spain) ... [et al.], (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xv, 730 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote
Label
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain, Carles Cane+ѓ, Jung-Chih Chiao, Fernando Vidal Verdu+ѓ, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectro+ѓnica (Spain) ... [et al.], (electronic book)
Publication
Bibliography note
Includes bibliographical references and author index
Dimensions
28 cm.
Dimensions
unknown
Extent
xv, 730 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic resource.
Sound
unknown sound
Specific material designation
remote

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