Coverart for item
The Resource Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany, Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE [and others]

Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany, Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE [and others]

Label
Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany
Title
Smart sensors, actuators, and MEMS IV
Title remainder
4-6 May 2009, Dresden, Germany
Statement of responsibility
Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE [and others]
Title variation
  • Smart sensors, actuators, and MEMS 4
  • Smart sensors, actuators, and MEMS four
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
NHM
Dewey number
621.381
Illustrations
illustrations
Index
no index present
LC call number
TK7875
LC item number
.S518 2009e
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1960-
http://library.link/vocab/relatedWorkOrContributorName
  • Schmid, Ulrich
  • Cané, Carles.
  • Shea, Herbert R
  • SPIE (Society)
Series statement
Proceedings of SPIE,
Series volume
v. 7362
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Microtechnology
  • Actuators
  • Detectors
  • Scanning systems
Label
Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany, Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE [and others]
Instantiates
Publication
Note
Title from PDF title page (SPIE digital library, viewed June 16, 2009)
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
File format
unknown
Form of item
online
Isbn
9780819476364
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Quality assurance targets
unknown
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
Label
Smart sensors, actuators, and MEMS IV : 4-6 May 2009, Dresden, Germany, Ulrich Schmid, Carles Cané, Herbert Shea, editors ; sponsored by SPIE Europe, [and] GMM VDE/VDI Gesellschaft Mikroelektronik, Mikro- und Feinmechanik ; cooperating organizations, SPIE [and others]
Publication
Note
Title from PDF title page (SPIE digital library, viewed June 16, 2009)
Antecedent source
unknown
Bibliography note
Includes bibliographical references
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
unknown
Extent
1 online resource
File format
unknown
Form of item
online
Isbn
9780819476364
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations (some color).
Quality assurance targets
unknown
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote

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