Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore
Resource Information
The work Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore represents a distinct intellectual or artistic creation found in University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
The Resource
Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore
Resource Information
The work Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore represents a distinct intellectual or artistic creation found in University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
- Label
- Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore
- Title remainder
- 28-30 November 2000, Singapore
- Statement of responsibility
- Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]
- Language
- eng
- Cataloging source
- SPIED
- Illustrations
- illustrations
- Index
- index present
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- Series statement
- SPIE proceedings series
- Series volume
- 4226
Context
Context of Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, SingaporeWork of
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/resource/I3S4IjfREBg/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/resource/I3S4IjfREBg/">Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
