Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

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The instance Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book) represents a material embodiment of a distinct intellectual or artistic creation found in University of Liverpool.

The Resource Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

Image: http://covers.openlibrary.org/b/isbn/9780841207752-M.jpg?default=false

Label: Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

Title remainder: theory, materials, and processing

Medium: electronic book

Statement of responsibility: L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

Instantiates

Introduction to microlithography : theory, materials, and processing

Publication

Washington, D.C., American Chemical Society, 1983

Bibliography note: Includes bibliographical references and index

Carrier category: online resource

Carrier category code

Carrier MARC source: rdacarrier

Content category: text

Content type code

Content type MARC source: rdacontent

Contents: An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin

Dimensions: 24 cm.

Extent: ix, 363 p.

Form of item: electronic

Isbn: 9780841207752

Lccn: 83005968

Media category: computer

Media MARC source: rdamedia

Media type code

Other physical details: ill.

Record ID: b2239681

Reproduction note: Electronic Resource.

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Context of Introduction to microlithography : theory, materials, and processing, L.F. Thompson, C.G. Willson, M.J. Bowden, editors ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983, (electronic book)

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Item

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