Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore
Resource Information
The work Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore represents a distinct intellectual or artistic creation found in University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
The Resource
Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore
Resource Information
The work Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore represents a distinct intellectual or artistic creation found in University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
- Label
- Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore
- Title remainder
- 25-26 June, 1997, Singapore
- Statement of responsibility
- Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering
- Language
- eng
- Cataloging source
- SPIED
- Dewey number
- 621.3815
- Illustrations
- illustrations
- Index
- index present
- LC call number
- TK7874
- LC item number
- .M48745 1997
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- Series statement
- SPIE proceedings series,
- Series volume
- 3183
Context
Context of Microlithographic techniques in IC fabrication : 25-26 June, 1997, SingaporeWork of
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/resource/KyL7w0LnFig/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/resource/KyL7w0LnFig/">Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">University of Liverpool</a></span></span></span></span></div>
