Context

Context of Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA), (electronic book)