MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
Resource Information
The work MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA represents a distinct intellectual or artistic creation found in Sydney Jones Library, University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
The Resource
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
Resource Information
The work MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA represents a distinct intellectual or artistic creation found in Sydney Jones Library, University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books, http://bibfra.me/vocab/marc/conference-publication.
- Label
- MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
- Title remainder
- 27-29 January 2003, San Jose, California, USA
- Statement of responsibility
- James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
- Title variation
- Microelectromechanical systems and miniaturized systems III
- Contributor
-
- Semiconductor Equipment and Materials International
- Semiconductor Equipment and Materials International
- Society of Photo-optical Instrumentation Engineers
- Solid State Technology (Organization)
- Solid State Technology (Organization)
- Krulevitch, Peter A
- Lakner, Hubert K
- Smith, James H
- Sandia National Laboratories
- Sandia National Laboratories
- Language
- eng
- Cataloging source
- SPIED
- Illustrations
- illustrations
- Index
- index present
- LC call number
- TK7874
- LC item number
- .M5326 2003
- Literary form
- non fiction
- Nature of contents
-
- dictionaries
- bibliography
- Series statement
- SPIE proceedings series,
- Series volume
- 4983
Context
Context of MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USAWork of
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/resource/nlxsRmzaFYs/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/resource/nlxsRmzaFYs/">MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">Sydney Jones Library, University of Liverpool</a></span></span></span></span></div>
