The Resource Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA), (electronic book)

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA), (electronic book)

Label
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA
Title
Micromachining and microfabrication process technology VI
Title remainder
18-20 September 2000, Santa Clara, USA
Statement of responsibility
Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
LC call number
  • TJ1191.5
  • QC176.8.M5
LC item number
  • .M55243 2000
  • M43 2000
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Karam, Jean-Michel
  • Yasaitis, John
  • Society of Photo-optical Instrumentation Engineers
  • Semiconductor Equipment and Materials International
  • Solid State Technology (Organization)
  • Sandia National Laboratories
Series statement
SPIE proceedings series
Series volume
4174
http://library.link/vocab/subjectName
  • Micromachining
  • Microfabrication
  • Electromechanical devices
Label
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA), (electronic book)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 524 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote
Label
Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA, Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA), (electronic book)
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
28 cm.
Dimensions
unknown
Extent
x, 524 p.
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
ill.
Reproduction note
Electronic resource.
Specific material designation
remote

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