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Low pressure plasmas and microstructuring technology
Resource Information
The work Low pressure plasmas and microstructuring technology represents a distinct intellectual or artistic creation found in Sydney Jones Library, University of Liverpool. This resource is a combination of several types including: Work, Language Material, Books.

The Resource Low pressure plasmas and microstructuring technology
Label
Low pressure plasmas and microstructuring technology
Statement of responsibility
by Gerhard Franz
Creator
  • Franz, Gerhard, Dr. rer. nat
Subject
  • Electronics and Microelectronics, Instrumentation
  • Material Science
  • Optical and Electronic Materials
  • Plasma (Ionized gases) -- Industrial applications
  • Plasma engineering
  • Plasma etching
  • Surfaces and Interfaces, Thin Films
  • Atomic and Molecular Structure and Spectra
Language
eng
Cataloging source
GW5XE
Dewey number
621.044
Illustrations
illustrations
Index
no index present
LC call number
QC718
LC item number
.F73 2009
Literary form
non fiction
NAL call number
TA2020
NAL item number
.F73 2009
Nature of contents
  • dictionaries
  • bibliography

Context

Context of Low pressure plasmas and microstructuring technology

Work of

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  • Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)
  • Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)
  • Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)
  • Low pressure plasmas and microstructuring technology, by Gerhard Franz, (electronic book)

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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.liverpool.ac.uk/resource/PtdNBU73EkA/" typeof="CreativeWork http://bibfra.me/vocab/lite/Work"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.liverpool.ac.uk/resource/PtdNBU73EkA/">Low pressure plasmas and microstructuring technology</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.liverpool.ac.uk/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.liverpool.ac.uk/">Sydney Jones Library, University of Liverpool</a></span></span></span></span></div>
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